- etch-and-refill technique
- метод избирательного травления и заполнения канавок
English-Russian dictionary of microelectronics. 2014.
etch-and-refill technique
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Parts cleaning — is essential to many industrial processes, as a prelude to surface finishing or to protect sensitive components. Electroplating is particularly sensitive to part cleanliness, since molecular layers of oil can prevent adhesion of the coating. ASTM … Wikipedia
